Yang, Taho; Shen, Yu-An; Cho, Chiwoon; Lin, Yu-Ru - In: European Journal of Industrial Engineering 6 (2012) 3, pp. 281-300
With the increase in the size and weight of 300-mm wafers, manual handling has become difficult and automated material handling systems (AMHS) are necessary. The 300-mm fab requires only one type of vehicle and rail to connect all of the process resources, allowing vehicles to travel directly...